Frank Forward 213
6350 Stores Road
Vancouver BC, V6T 1Z4
phone: 604–822–0478
fax: 604–822–3619
Education
Massachusetts Institute of Technology, MSc, PhD
Tsinghua University, BS
Research Areas
Group Members
Alumni
Research Interests
Novel semiconductor materials: strained Si, SiGe and Ge;
Process physics: dopant diffusion, interdiffusion, implant and activation;
SiGe devices for electronic and optical applications, Si based optoelectronics;
Stress characterization, simulations and modeling for lattice-mismatched material systems;
III-V and Si integration;
Raman spectroscopy
Courses
MTRL 478 Electronic Materials
MTRL 465 Engineering Design II
MTRL 592 Advanced topics in Materials Engineering — Si VLSI technology fundamentals, practice and modeling
MTRL 466 Design Project
Projects
Publications