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Optical MEMS

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This project proposes to fabricate Optical Micro-Electro-Mechanical Systems (O-MEMS)for optical acceleration measurements. These would allow for more sensitive, accurate, and reliable measurements, exploiting advantages such as the linear relation between the velocity and the Doppler frequency shift, and the high, wavelength-dependent resolution levels achievable.
This project aims at developing arrays of micromirrors with high resonance frequencies and high tilt angles in all directions. The mirrors are actuated through electrostatic forces to reach continuous tilt angles. The mirrors are fabricated using multi user MEMS processes.