We constructed an equivalent circuit of a multi degree of freedom comb
drive actuator for easily analyzing its operation function by Lagrange
equation. The circuit has an advantage that it can easily predict the
operation properties, for example frequency dependency. To obtain the
circuit, at first, Lagrange function was derived from the analytical
model, and then the driving matrix in obtained by solving the function.
The matrix shows the electrical and the mechanical equations. The circuit
was derived from the matrix, and it was simulated by SPICE. Additionally
advantage of this method is possible to analyze high integrated micro
systems including control circuit with SPICE.