In general, non-traditional micromachining techniques such as electro-discharge (EDM), mechanical, and electrochemical machining that use single-tip microtools are performed with ultra-precision NC apparatus, which causes low throughput and incurs high costs of ownership. Micro-EDM is a non-contact micromachining technique that can be used to cut any type of electrically conductive materials. The technique is capable of producing real three-dimensional microstructures while achieving the smallest size of 5 µm with submicron tolerance. In this project we focus on the use of MEMS to achieve the micro-EDM process in order to address the constraints above. This talk describes a lithography-compatible micro-EDM method, where planar electrodes are microfabricated directly on the surfaces of the work material and electrostatically actuated for controlled generation of discharge pulses towards large-area, low-cost, and high-precision processing that does not require NC machines.