Uniform and Sampled Bragg Gratings in SOI Strip Waveguides with Sidewall Corrugations
Publication Type:Journal Article
Source:IEEE Photonics Technology Letters, Volume 23, Issue 5, p.290 - 292 (2011)
Keywords:Bragg gratings; sampled gratings; silicon-on-insulator; strip waveguides
We have demonstrated uniform and sampled Bragg gratings in silicon-on-insulator strip waveguides with symmetric sidewall corrugations. The fabrication is based on 193-nm deep ultraviolet lithography using a single mask. The measured reflection spectra of sampled gratings exhibit ten usable peaks spaced by 4.2 nm, and show good agreement with theoretical predictions.