SOI Nanophotonics Fabrication Course
Publication Type:Conference Paper
Source:Pacific Centre for Advanced Materials and Microstructures (PCAMM) Annual Meeting (2010)
Due to its high refractive index contrast, Silicon-On-Insulator (SOI) nanotechnology allows for the miniaturization of photonic devices onto a single chip for applications including optical communications, filtering, sensing, and faster on-chip communications. Consequently, in the last few years there has been an increasing interest in this technology at the industry, research, and graduate teaching level. This unique Canada-wide course, held at UBC in collaboration with CMC and IMEC, focuses on the design and characterization of nanophotonic devices based on SOI technology. We present an overview of some of the designs previously investigated and published as part of this course as well as the some of the designs of the third generation, currently being fabricated by our collaborators at IMEC Belgium.