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Silicon photonic slot waveguide Bragg gratings and resonators

Publication Type:

Journal Article


Optics Express, Volume 21, Issue 16, p.19029-19039 (2013)



Gratings; Integrated optics devices; Resonators; Waveguides


We present the design, fabrication, and characterization of integrated Bragg gratings in silicon-on-insulator slot waveguides. The Bragg gratings are formed with sidewall corrugations, either on the inside or on the outside of the waveguide. We demonstrate resonators implemented using phase-shifted Bragg gratings in slot waveguides, showing quality factors up to 3 × 10^4. Due to the strong optical confinement in the slot, these devices are promising for optical sensing applications. The devices were fabricated using a CMOS-compatible process, facilitating high-volume and low-cost production.


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Research Area(s): 
Photonics and Optics