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Silicon photonic micro-disk resonators for label-free biosensing

Publication Type:

Journal Article


Optics Express, The Optical Society, Volume 21, Issue 7, p.7994–8006 (2013)



optical biosensors; disk resonators; nanophotonics; silicon photonics; multiplexed sensors; TE/TM; silicon on insulator


Silicon photonic biosensors are highly attractive for multiplexed Lab-on-Chip systems. Here, we characterize the sensing performance of 3 μm TE-mode and 10 μm dual TE/TM-mode silicon photonic micro-disk resonators and demonstrate their ability to detect the specific capture of biomolecules. Our experimental results show sensitivities of 26 nm/RIU and 142 nm/RIU, and quality factors of 33 000 and 16 000 for the TE and TM modes, respectively. Additionally, we show that the large disks contain both TE and TM modes with differing sensing characteristics. Finally, by serializing multiple disks on a single waveguide bus in a CMOS compatible process, we demonstrate a biosensor capable of multiplexed interrogation of biological samples.

Faculty Member(s): 
Faculty Member(s): 
Research Area(s): 
Biomedical Engineering
Research Area(s): 
Sensors and Actuators
Research Area(s): 
Photonics and Optics