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Silicon-on-Insulator Bragg Gratings Fabricated by Deep UV Lithography

Publication Type:

Conference Proceedings

Source:

Asia Communications and Photonics Conference and Exhibition (2010)

URL:

http://dx.doi.org/10.1109/ACP.2010.5682598

Abstract:

We demonstrate the design and performance of Bragg gratings on silicon-on-insulator waveguides. Two structures for achieving the modulation of the effective index of refraction are described. The grating fabrication is based on deep ultra-violet lithography using a single mask. The thermal tunability of the devices is demonstrated.

Faculty Member(s): 
Lukas.Chrostowski
Faculty Member(s): 
Nicolas.Jaeger
Research Area(s): 
Photonics and Optics