Silicon-on-Insulator Bragg Gratings Fabricated by Deep UV Lithography
Publication Type:Conference Proceedings
Source:Asia Communications and Photonics Conference and Exhibition (2010)
We demonstrate the design and performance of Bragg gratings on silicon-on-insulator waveguides. Two structures for achieving the modulation of the effective index of refraction are described. The grating fabrication is based on deep ultra-violet lithography using a single mask. The thermal tunability of the devices is demonstrated.