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Si-Ge interdiffusion, dopant diffusion and segregation in SiGe and SiGe: C based devices

Publication Type:

Book Chapter

Source:

Micro- and Nanoelectronics Emerging Device Challenges and Solutions, CRC Press (2014)

ISBN:

978-1-4822-1491-8

URL:

http://www.crcnetbase.com/doi/book/10.1201/b17597

Faculty Member(s): 
Guangrui.Xia
Research Area(s): 
Electronics