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The pull-in of symmetrically and asymmetrically driven microstructures and the use in DC voltage references

Publication Type:

Conference Paper

Source:

Instrumentation and Measurement Technology Conference, 2002. IMTC/2002. Proceedings of the 19th IEEE ,Volume: 1 , 21-23 May 2002, Anchorage, Alaska, USA, p.759-764 (2002)

URL:

http://ieeexplore.ieee.org/search/srchabstract.jsp?arnumber=1006937&isnumber=21717&punumber=7883&k2dockey=1006937

Keywords:

electrostatic actuators hysteresis measurement standards mechanical stability micromachining voltage measurement 10.5 to 11 V 9.1 to 9.5 V DC voltage reference Taylor series asymmetrically driven microstructures electrostatically actuated microbeams epi-p

Abstract:

Micromechanical structures have been designed, fabricated in silicon
and tested for use as on-chip voltage reference Applications are
in electrical metrology and in integrated silicon Microsystems. Microbeams
of 100 /spl mu/m length, 3 /spl mu/m width and 11 /spl mu/m thickness
are electrostatically actuated with a very reproducible pull-in voltage.
The structure can be either symmetrically or asymmetrically actuated,
resulting in different pull-in voltages, as well as different operational
specifications e.g. hysteresis and reproducibility. A two dimensional
energy-based analytical model for the static pull-in is derived for
both actuation types and compared with measurements. Devices have
been designed and fabricated in an epi-poly process. Measurements
show a pull-in voltage in the 9.1-9.5 V range for the asymmetric
case and 10.5-11 V range for the symmetric case, both in agreement
with modeling.

Notes:

L.A. Rocha, E. Cretu, R.F. Wolffenbuttel [2002] -_The pull-in of symmetrically and asymmetrically driven microstructures and the use in DC voltage references_, in IMTC2002, The 19th IEEE Instrumentation and Measurement Technology Conference, Anchorage, Alaska, USA, May 21-23