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Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement

Publication Type:

Journal Article

Source:

(IOP) Journal of Micromechanics and Microengineering, Volume 15, Number 7, p.S103-S108 (2005)

URL:

http://www.iop.org/EJ/abstract/-search=24199841.1/0960-1317/15/7/015