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Novel band-pass sliding mode control for driving MEMS-based resonators

Publication Type:

Journal Article


Sensors and Actuators A: Physical (2012)


This paper describes the application of a novel band-pass sliding mode control (SMC) to the driving mode of
MEMS-based resonators and resonant sensors (e.g. vibrating gyroscopes). The proposed technique relies
on binary electrostatic actuation of the movable mass, dependent on the dynamics of the sliding/switching
surface, in such a way that the generated actuation tracks possible changes in the mechanical resonant
frequency induced by external factors (humidity, temperature, pressure, etc.). The core of the proposed
adaptive method is the implementation in hardware of an adaptive behavioral reference model used
by the controller, able to track the sensed changes in dynamics. The architecture has a low hardware
complexity and is suitable for VLSI implementation, in addition to a robust tracking behavior for large
variations in the parameters of the resonator (e.g. temperature-induced changes in the stiffness coefficient).
Simulation results demonstrate the effectiveness of the proposed technique by maintaining
the actuation of the system at its resonance frequency even in the presence of variations of the stiffness
coefficient (step, linear)or of applied external forces (external acceleration and noise). Simulations
results suggest that the novel SMC-based oscillator offers an advantageous alternative to more complex
phase-locked loop (PLL) architectures, traditionally used for the driving of MEMS resonator structures.

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Sensors and Actuators