Noise-based Optimisation and Noise analysis for Resonant MEMS structures
Publication Type:Conference Paper
Source:DTIP 2008 ( Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, http://documents.irevues.inist.fr/bitstream/2042/16865/1/dtip08085.pdf, Nice, France (2008)
This paper presents a detailed noise analysis and
noise-based optimization procedure for resonant MEMS structures.
A design for high sensitivity of MEMS structures needs to take into
account the noise shaping induced by damping phenomena at micro
scale. The extraction of a behavioral model of the solid gas
interaction is obtained by matching the FEA simulations with a
parametric expression for the squeeze-film damping, suggested by
the analytical modeling.