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Noise-based Optimisation and Noise analysis for Resonant MEMS structures

Publication Type:

Conference Paper


DTIP 2008 ( Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS,, Nice, France (2008)



This paper presents a detailed noise analysis and
noise-based optimization procedure for resonant MEMS structures.
A design for high sensitivity of MEMS structures needs to take into
account the noise shaping induced by damping phenomena at micro
scale. The extraction of a behavioral model of the solid gas
interaction is obtained by matching the FEA simulations with a
parametric expression for the squeeze-film damping, suggested by
the analytical modeling.

Faculty Member(s): 
Research Area(s): 
Sensors and Actuators