Monolithic integration of AlGaAs distributed Bragg reflectors on virtual Ge substrates via aspect ratio trapping
Publication Type:Conference Paper
Source:International SiGe Technology and Device Meeting (2010)
URL:http://www.mina.ubc.ca/files/Abstract ISTDM 2010 Lin_v5.pdf
We report the first successful monolithic integration of AlGaAs distributed Bragg reflectors (DBR) on virtual Ge substrates via aspect ratio trapping ─ the first and crucial step towards the successful integration of VCSELs on Si platforms. The ART-based DBRs have reflectivity spectra comparable to those grown on bulk GaAs substrates.