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Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and its Wireless Telemetry Application

Publication Type:

Journal Article

Source:

Sensors, Volume 8, p.2317-2330 (2008)

Faculty Member(s): 
Kenichi.Takahata
Research Area(s): 
Sensors and Actuators