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Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback

Publication Type:

Conference Paper


Instrumentation and Measurement Technology Conference, 2003. IMTC '03. Proceedings of the 20th IEEE ,20-22 May 2003, IEEE, Vail, Colorado, USA, p.1197 - 1201 (2003)



accelerometers force feedback micromachining pendulums silicon spectral analysers vibration measurement -based acceleration measurement capacitive accelerometer condition monitoring drive voltage electronic modulation electrostatic force feedback electros


Capacitive accelerometers with electrostatic force feedback are widely
employed, because of performance and robustness. The force feedback
acts as a means for electronic modulation of the spring constant
of the suspension. Commonly, the electrostatic feedback is employed
for -based acceleration measurement. A suitable electrostatic time-varying
actuation could instead be used to make the accelerometer selectively
sensitive to a coherent mechanical frequency component. By sweeping
the frequency of the drive voltage over a selected range, the mechanical
spectrum is analyzed in the mechanical domain. The resulting spectrum
analyzer features many advantages compared to conventional techniques
for condition monitoring of mechanical machines. An inverted pendulum
type of accelerometer structure has been fabricated in silicon using
micromachining techniques and operated using electrostatic momentum


L.A.Rocha, E.Cretu, G. de Graaf and R.F. Wolffenbuttel [2003] -_Mechanical Spectrum Analyzer in Silicon using Micromachined Accelerometers with Time-Varying Electrostatic Feedback_, in IMTC2003, The 20th IEEE Instrumentation and Measurement Technology Conference, Vail, Co, USA, 20-22 May 2003