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An Investigation on a Vibration-Based Active Protein Desorption Mechanism for Implantable MEMS-Based Biosensor Applications

Publication Type:

Conference Paper


Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, p.815--818 (2007)


biofouling; implantable biosensors; protein-desorption; shear stress


This paper presents for the first time an active protein desorption mechanism initiated by a MEMS vibrating membrane. Unlike conventional, passive biocompatible polymer coatings, active micromachined lead zircornate titanate (PZT) plate is used to generate an acoustic streaming force for minimizing the protein adsorption on a SiO2 surface. Preliminary in vitro testing showed that 57{\^A}$\pm$10{\%} of adsorbed bovine serum albumin (BSA) and 47{\^A}$\pm$13{\%} of IgG were effectively removed from a vibrating surface. A simulation study on the vibration-frequency spectrum indicates the resonant frequency at 274 kHz matches well with the experimental data.