User login

Intelligent sensors in silicon - an industrial perspective

Publication Type:

Conference Paper

Source:

Proc. of Microtechnology in Metrology and Metrology in Microsystems 2000, Delft, The Netherlands, p.59-68 (2000)

Notes:

E.Cretu, R. Diels [2000] -_ Intelligent sensors in silicon - an industrial perspective_, in Microtechnology in Metrology and Metrology in Microsystems, Delft, The Netherlands, 31 Aug-1 Sept 2000, pp. 59-68