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High-Aspect-Ratio, 3-D Micromachining Of Carbon-Nanotube Forests by Micro-Electro-Discharge Machining in Air

Publication Type:

Conference Paper

Source:

Proceeding IEEE MEMS, Cancun, Mexico (2011)

Faculty Member(s): 
Alireza.Nojeh
Faculty Member(s): 
Kenichi.Takahata