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Full-gap positioning of parallel-plate electrostatic MEMS using on-off control

Publication Type:

Journal Article

Source:

IEEE Int. Symposium on Industrial Electronics (ISIE2007), IEEE, Vigo, Spain, p.1464-1468 (2007)

ISBN:

1 4244 0755 9

Faculty Member(s): 
Edmond.Cretu
Research Area(s): 
Sensors and Actuators