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Full characterisation of pull-in in single-sided clamped beams

Publication Type:

Journal Article

Source:

Sensors and Actuators A: Physical, Volume Volume 110, Number Issues 1-3, p.301-309 (2004)

URL:

http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6THG-4B3JT2Y-3&_coverDate=02%2F01%2F2004&_alid=187359766&_rdoc=1&_fmt=&_orig=search&_qd=1&_cdi=5282&_sort=d&view=c&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=7c3d5524adb1f381616735a08

Keywords:

DC voltage reference; MEMS stability; Reproducibility; Pull-in

Abstract:

The most striking characteristic of the voltage-to-deflection curve
of an electrostatically actuated beam is pull-in. The actual value
of the pull-in voltage depends on: drive mode, temperature dependence
and dielectric charging related drift. These aspects have been analysed
using structures designed for a 9 V nominal pull-in voltage and fabricated
in a commercially available epipoly process. Single-sided clamped
beams have been used to avoid any influence of residual stress in
the beam on pull-in. Typical results are: less than 5% variation
of the pull-in voltage over a wafer, 0.17_1.9 V hysteresis depending
on drive mode, a ?1 mV/K TC and ?12 mV drift during the first 2 weeks
of operation.