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Frequency Dependent Noise Analysis and Damping in MEMS

Publication Type:

Journal Article


Journal of Microsystem Technology, Springer Verlag (2008)



The paper presents a combined noise and
damping analysis for MEMS structures, based on frequency-
dependent behavioral models extracted from finite
element simulations. The design of high sensitivity MEMSbased
microsystems needs to consider the frequency noise
shaping induced by damping phenomena on micro scale
motion, for its contribution can be significant in the system
level noise analysis. Frequency-dependent behavioral
models for squeeze-film damping are generated from finite
element analysis simulations. Unlike existing noise analysis
reported in literature, based on frequency-independent
damping assumption, the paper integrates the damping and
noise aspects using the same frequency-dependent models.
The results can be used for a noise-based optimization
procedure applied to the design of resonating microsensors,
as illustrated for the case of a MEMS-based gyroscope.

Faculty Member(s): 
Research Area(s): 
Sensors and Actuators