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Electro-Mechanical Compensation of the Temperature Coefficient of the Pull-In Voltage of Microstructures

Publication Type:

Conference Paper

Source:

Eurosensors XVII, 17th European Conference on Solid-State Transducers, 20-21 September 2003, Guimar{\~a}es, Portugal, Guimar{\~a}es, Portugal (2003)

Notes:

L.A. Rocha, E. Cretu and R.F. Wolffenbuttel [2003] -_Electro-Mechanical Compensation of the Temperature Coefficient of the Pull-In Voltage of Microstructures_[oral presentation], in Eurosensors XVII, 17th European Conference on Solid-State Transducers, 20-21 September 2003, Guimar{\~a}es, Portugal