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A digitally controlled MEMS gyroscope with unconstrained sigma-delta force-feedback architecture

Publication Type:

Conference Paper

Source:

Proceedings of the 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), jan. 22-26, Istanbul, Turkey, IEEE, Istanbul, Turkey (2006)

URL:

http://www.mems2006.org/program/MEMS_2006_Program.pdf