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Design and Implementation of a Novel Sliding Mode Sensing Architecture for Capacitive MEMS Accelerometers

Publication Type:

Journal Article

Source:

Journal of Micromechanics and Microengineering (2011)

Faculty Member(s): 
Edmond.Cretu
Faculty Member(s): 
shahriar.mirabbasi
Research Area(s): 
Electronics
Research Area(s): 
Sensors and Actuators