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Dense dissimilar waveguide routing for highly efficient thermo-optic switches on silicon

Publication Type:

Journal Article


Optics Express (2015)



We analyze and demonstrate a method for increasing the efficiency of thermo-optic phase shifters on a silicon-on-insulator platform. The lack of cross-coupling between dissimilar waveguides allows highly dense waveguide routing under heating elements and a corresponding increase in efficiency. We demonstrate a device with highly dense routing of 9 waveguides under a 10 µm wide heater and achieve a low switching power of 95 µW, extinction ratio greater than 20 dB, and less than 0.1 dB ripple in the through spectrum with a footprint of less than 800 µm × 180 µm. The increase in waveguide density is found not to negatively impact the switch response time.

Faculty Member(s): 
Research Area(s): 
Photonics and Optics