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A Cavity-Less Micromachined Capacitive Pressure Sensor for Wireless Operation in Liquid Ambient

Publication Type:

Journal Article

Source:

Proc. Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head 2008), USA (2008)

Faculty Member(s): 
Kenichi.Takahata
Research Area(s): 
Sensors and Actuators