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Bulk-micromachined tuneable Fabry-Perot microinterferometer for the visible spectral range

Publication Type:

Conference Paper

Source:

Proc. Eurosensors XII, Southampton, UK, September 1998, Southampton, UK (1998)

Notes:

J.H. Correia, E. Cretu, M. Bartek and R.F. Wolffenbuttel [1998]-_Bulk-micromachined tuneable Fabry-Perot microinterferometer for the visible spectral range", Proc. Eurosensors XII, Southampton, UK, September 1998