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Arrays of large-area, large-angle tip/tilt micromirrors for use in a high-contrast projector

Publication Type:

Journal Article


Sensors and Actuators A: Physical, Elsevier, Volume 173, Issue 1, p.172-179 (2012)


Arrays of two-degree of freedom analog micromirrors are designed for use within an high-contrast projector and fabricated using a multi-user MEMS fabrication process. We demonstrate a novel way of optimizing the tradeoffs between tilt angle and mirror size by subdividing the mirrors into smaller functional subsections that move synchronously. The mirror design employs multiple mirrors within a gimbal frame. The frame rotates around one axis, and each mirror within the frame rotates around a perpendicular axis, resulting in two-degree of freedom rotation. The design employs specific electrode
shapes to allow one-layer connections.
Using these fabricated mirrors, simultaneous actuation of mirrors within a composite structure is achieved. A prototype array of fabricated mirrors is described, with 6 × 5 mirrors each of 160µm×160µm forming one composite mirror of an array, giving total active area of 960µm ×800µm. The mirrors can achieve a maximum tilt angle of 2.25°. The fill factor of this design is 68%.

Faculty Member(s): 
Research Area(s): 
Sensors and Actuators
Research Area(s): 
Photonics and Optics