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Analytical Modelling for Accelerometers with Electrically Tunable Sensitivity

Publication Type:

Conference Paper

Source:

Proc. of the International Conference on Modeling and Simulation of Microsystems - MSM'99, San Juan, Puerto Rico, USA, p.601-604 (1999)

Notes:

E. Cretu, M. Bartek, and R.F. Wolffenbuttel [1999]- _Analytical Modelling for Accelerometers with Electrically Tunable Sensitivity_, in Proc. of the International Conference on Modeling and Simulation of Microsystems - MSM'99, San Juan, Puerto Rico, USA, 19-21 April 1999, pp. 601-604 oral presentation