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Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage

Publication Type:

Journal Article

Source:

18th MicroMechanics Europe, Guimaraes, Portugal, p.355-358 (2007)

ISBN:

978 972 98603 3 1

Faculty Member(s): 
Edmond.Cretu
Research Area(s): 
Sensors and Actuators