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Analog Large-Deflection Micromirror Arrays

Abstract

This project aims at developing arrays of micromirrors with high resonance frequencies and high tilt angles in all directions. The mirrors are actuated through electrostatic forces to reach continuous tilt angles. The mirrors are fabricated using multi user MEMS processes.

Project Description

The objective of this project is to...

Faculty Supervisor(s)

    Boris.Stoeber   

Researchers(s)

    reynald   

Research Area(s)