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Laser Doppler Vibrometer

The laser Doppler vibrometer Polytec OFV-5000 allows single-point vibration measurement. It is coupled into a microscope to measure vertical surface motion of MEMS devices. The laser Doppler vibrometer is equipped with the velocity decoder VD-02 (best resolution: 0.15┬Ám/s, max velocity: 10 m/s, upper frequency limit: 1.5 MHz) as well as with the displacement decoder DD-200 (best resolution: 2 nm, full scale output: +/- 82 mm, frequency range: 0 Hz - 250 kHz).

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