%0 Journal Article %J BIOMEDICAL MICRODEVICES %D 2006 %T Regenerated spider silk as a new biomaterial for MEMS %A Bai, J M %A Ma, T %A Chu, W %A Wang, R Z %A Silva, L %A Michal, C %A Chiao, J C %A Chiao, M %P 317--323 %V 8 %X Spider drag-line silk is introduced for the first time as a new biomaterial for Micro-Electro-Mechanical Systems (MEMS). The tasks accomplished in this paper were focused on mechanical characterization of regenerated spider silk under two conditions: (1) spin-coated thin film formed onto a silicon substrate; and (2) formation of a free-standing microbridge (800 x 800 x 40 mu m(3)) obtained by a surface micromachining process. Micromechanical tests using a nano indentation machine showed the spider silk film having an elastic modulus of 7.3 GPa, a loss tangent of 0.044 and an UTS (Ultimate Tensile Strength) of 85.1 MPa. %8 Dec %9 article