%0 Conference Paper %B Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on %D 2005 %T MEMS-based sonoporation devices for intratumoral gene therapy %A Siu, T %A Trivedi, D M %A Chiao, M %A Rohling, R %K biomedical equipment; biomedical ultrasonics; cavitation; cellular biophysics; genetics; micromechanical devices; patient treatment; 0.75 mm; 1 cm; HUVEC; MEMS-based sonoporation devices; PC3; PZT plate; cavitation-induced sonoporation; cell transfection; %P 205--208 Vol. 1 %V 1 %X This paper presents a miniature device for intratumoral delivery of oligonucleotides (ASO). A PZT plate (1 cm/sup 2/ /spl times/ 0.75mm) is used to transfect cells using cavitation-induced sonoporation. Both human umbilical vein endothelial cells (HUVEC) and human prostate cancer cells (PC3) are investigated in vitro. Preliminary results show that after cavitation-induced sonoporation, the transfection rate for HUVEC increases by 10{\%} compared to controls (p<0.01). For PC3, the transfection rate increases by 7{\%} compared to controls (p<0.01). %9 inproceedings