%0 Conference Paper %B Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International %D 2007 %T An Investigation on a Vibration-Based Active Protein Desorption Mechanism for Implantable MEMS-Based Biosensor Applications %A Yeh, Po-Ying %A Chiao, Mu %A Kizhakkedathu, Jayachandran %K biofouling; implantable biosensors; protein-desorption; shear stress %P 815--818 %X This paper presents for the first time an active protein desorption mechanism initiated by a MEMS vibrating membrane. Unlike conventional, passive biocompatible polymer coatings, active micromachined lead zircornate titanate (PZT) plate is used to generate an acoustic streaming force for minimizing the protein adsorption on a SiO2 surface. Preliminary in vitro testing showed that 57{\^A}$\pm$10{\%} of adsorbed bovine serum albumin (BSA) and 47{\^A}$\pm$13{\%} of IgG were effectively removed from a vibrating surface. A simulation study on the vibration-frequency spectrum indicates the resonant frequency at 274 kHz matches well with the experimental data. %9 inproceedings