%0 Journal Article %J Sensors and Actuators A: Physical %D 2000 %T Spectral analysis through electromechanical coupling %A Cretu, E %A Bartek, M %A Wolffenbuttel, R F %K Accelerometer; MEMS; Spectral analysis %P 23-32 %U http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6THG-41248CH-4&_coverDate=08%2F25%2F2000&_alid=187359548&_rdoc=1&_fmt=&_orig=search&_qd=1&_cdi=5282&_sort=d&view=c&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=770bfb345ec3440cb0a68473c %V A85 %X A general dynamic model for a momentum-actuated accelerometer is constructed, where both differential and common-mode actuation voltages are considered. The equivalent quasi-static model is applied to design a measurement scheme for low-frequency accelerations. A more general method for real-time spectral analysis of mechanical vibrations is presented, which relies on a feedback loop based on capacitive sensing, on-chip signal conditioning and electrostatic actuation. Both common- and differential-mode voltages are used to tune the accelerometer spectral characteristic, in order to extract the spectral component set by the electrostatic actuation. %Z Sensors and Actuators A: Physical Volume 85, Issues 1-3 , 25 August 2000, Pages 23-32 E. Cretu, M. Bartek and R.F. Wolffenbuttel [2000] -_Spectral Analysis Through Electromechanical Coupling_, in Sensors and Actuators A, vol. A85, No 1-3, 25 Aug. 2000, pp. 23-32 %8 25 August %9 article