%0 Conference Paper %B Proc. Eurosensors XII, Southampton, UK, September 1998 %D 1998 %T Bulk-micromachined tuneable Fabry-Perot microinterferometer for the visible spectral range %A Correia, J H %A Cretu, E %A Bartek, M %A Wolffenbuttel, R F %C Southampton, UK %Z J.H. Correia, E. Cretu, M. Bartek and R.F. Wolffenbuttel [1998]-_Bulk-micromachined tuneable Fabry-Perot microinterferometer for the visible spectral range", Proc. Eurosensors XII, Southampton, UK, September 1998 %8 September %9 inproceedings