%0 Conference Paper %B Workshop Sensortechnologie 1997, 12-13 March, Zeist, The Netherlands %D 1997 %T Microinstrumentation System in Silicon for Industrial applications %A Correia, J H %A Cretu, E %A Kong, S H %A Br{\"u}nner, M P %A Bartek, M %A Wolffenbuttel, R F %C Zeist, The Netherlands %8 March 12-13 %9 inproceedings