%0 Conference Paper %B Proc. of CPEM 2002, IEEE Conf. on Precision Electromagnetic Measurements %D 2002 %T Stability of Silicon microfabricated pull-in voltage references %A Rocha, L A %A Cretu, E %A Wolffenbuttel, R F %C Ottawa, Canada %Z L.A. Rocha and E. Cretu and R.F. Wolffenbuttel [2002] -_Stability of Silicon microfabricated pull-in voltage references_, Proc. of CPEM 2002, IEEE Conf. on Precision Electromagnetic Measurements, June 16-21, Ottawa, Canada %8 June 16-21 %9 inproceedings