%0 Conference Paper %B Proc. of Microtechnology in Metrology and Metrology in Microsystems 2000 %D 2000 %T Intelligent sensors in silicon - an industrial perspective %A Cretu, E %A Diels, R %C Delft, The Netherlands %P 59-68 %Z E.Cretu, R. Diels [2000] -_ Intelligent sensors in silicon - an industrial perspective_, in Microtechnology in Metrology and Metrology in Microsystems, Delft, The Netherlands, 31 Aug-1 Sept 2000, pp. 59-68 %8 31 Aug-1 Sept 20 %9 inproceedings