%0 Conference Paper %B MME_04, Micromechanics Europe Workshop, Proceedings of, September 5-7, 2004, Leuven, Belgium %D 2004 %T Harmonic displacement of a parallel-plate electrostatic actuator using a pre-distorted sinewave oscillator %A Graaf, Ger %A Mol, Lukas %A Rocha, L A %A Cretu, E %A Wolffenbuttel, R F %C Leuven, Belgium %P pp. 53-56 %8 September 5-7 %9 inproceedings