%0 Conference Paper %B MME_03, The 14th MicroMechanics Europe Workshop, 2-4 November 2003, Delft, The Netherlands %D 2003 %T Dynamics of pull-in: analysis of the meta-stable regime %A Rocha, L A %A Cretu, E %A Wolffenbuttel, R F %C Delft, The Netherlands %Z L.A. Rocha, E. Cretu and R.F. Wolffenbuttel [2003] -_Dynamics of pull-in: analysis of the meta-stable regime_, in MME_03, The 14th MicroMechanics Europe Workshop, 2-4 November 2003, Delft, The Netherlands %8 November 2-4 %9 inproceedings