%0 Journal Article %J (IOP) Journal of Micromechanics and Microengineering %D 2005 %T Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement %A Graaf, de %A Mol, L %A Rocha, L A %A Cretu, E %A Wolffenbuttel, R F %P S103-S108 %U http://www.iop.org/EJ/abstract/-search=24199841.1/0960-1317/15/7/015 %V 15 %8 July %9 article