%0 Journal Article %J (IEEE) Transactions on Instrumentation and Measurement %D 2005 %T MEMS-based Mechanical Spectrum Analyzer %A Rocha, L A %A Cretu, E %A Wolffenbuttel, R F %Z IEEE Instrumentation and Measurement Society IM-7235 MEMS-based Mechanical Spectrum Analyzer %8 June %9 article