%0 Conference Paper %B MME_04, Micromechanics Europe Workshop, Proceedings of, September 5-7, 2004, Leuven, Belgium %D 2004 %T Mechanical-thermal and 1/f Noise in MEMS Devices %A Rocha, L A %A Cretu, E %A Wolffenbuttel, R F %C Leuven, Belgium %P pp. 100-103 %8 September 5-7 %9 inproceedings