%0 Journal Article %J Sensors and Actuators A: Physical %D 2004 %T Full characterisation of pull-in in single-sided clamped beams %A Rocha, L A %A Cretu, E %A Wolffenbuttel, R F %K DC voltage reference; MEMS stability; Reproducibility; Pull-in %P 301-309 %U http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6THG-4B3JT2Y-3&_coverDate=02%2F01%2F2004&_alid=187359766&_rdoc=1&_fmt=&_orig=search&_qd=1&_cdi=5282&_sort=d&view=c&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=7c3d5524adb1f381616735a08 %V Volume 110 %X The most striking characteristic of the voltage-to-deflection curve of an electrostatically actuated beam is pull-in. The actual value of the pull-in voltage depends on: drive mode, temperature dependence and dielectric charging related drift. These aspects have been analysed using structures designed for a 9 V nominal pull-in voltage and fabricated in a commercially available epipoly process. Single-sided clamped beams have been used to avoid any influence of residual stress in the beam on pull-in. Typical results are: less than 5% variation of the pull-in voltage over a wafer, 0.17_1.9 V hysteresis depending on drive mode, a ?1 mV/K TC and ?12 mV drift during the first 2 weeks of operation. %8 1 February %9 article