%0 Conference Paper %B Proc. of the 6th Therminic Workshop %D 2000 %T Modelling of integrated polySiGe Peltier elements %A Wijngaards, D D L %A Cretu, E %A S.H., Kong %A Wolffenbuttel, R F %C Budapest, Hungary %8 Sept. 24-27 %9 inproceedings