%0 Conference Paper %B Material Research Society (MRS) 2000 Spring Meeting, Symposium A: Amorphous and Heterogeneous Silicon Thin Films %D 2000 %T A physically-based SPICE model for the leakage current in a-Si:H TFTs accounting for its dependencies on process, geometrical, and bias conditions %A Servati, P %A Nathan, A %A Sazonov, A %C San Francisco, California %P A28.3 %S MRS Proceedings %V 609 %8 04/2000